Title: Impact of metal etch residues on etch species density and uniformity
Authors: Dictus, Dries ×
shamiryan, Denis
Paraschiv, Vasile
Boullart, Werner
De Gendt, Stefan
Vinckier, Christiaan #
Issue Date: Jul-2010
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:28 issue:4 pages:789-794
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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