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Title: Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording
Authors: Herwik, Stanislav
Kisban, Sebastian
Aarts, Arno ×
Seidl, Karsten
Girardeau
Benchenane
Zugaro
Wiener
Paul, Olivier
Neves, Herc
Ruther, Patrick #
Issue Date: 30-Jun-2009
Publisher: IOP
Series Title: Journal of Micromechanics and Microengineering: Structures, Devices and Systems vol:18 issue:7
Abstract: This work presents a new fabrication technology for silicon-based neural probe devices and their assembly into two-dimensional (2D) as well as three-dimensional (3D) microprobe arrays for neural recording. The fabrication is based on robust double-sided deep reactive ion etching of standard silicon wafers and allows full 3D control of the probe geometry. Wafer level electroplating of gold pads was performed to improve the 3D assembly into a platform. Lithography-based probe-tracking features for quality management were introduced. Probes for two different assembly methods, namely direct bonding to a flexible micro-cable and platform-based out-of-plane interconnection, were produced. Systems for acute and sub-chronic recordings were assembled and characterized. Recordings from rats demonstrated the recording capability of these devices.
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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