Title: ESD On-Wafer Characterization: Is TLP Still the Right Measurement Tool?
Authors: Scholz, Mirko *
Linten, Dimitri * ×
Thijs, Steven
Sangameswaran, Sandeep
Sawada, Masanori
Nakaei, Toshiyuki
Hasebe, Takumi
Groeseneken, Guido #
Issue Date: Oct-2009
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE Transactions on Instrumentation and Measurement vol:58 issue:10 pages:3418-3426
Abstract: The electrical characterization of devices and circuits
regarding their electrostatic discharge (ESD) robustness is done
by using several measurement tools. Transmission line pulsing
(TLP) and human body model (HBM) testing are the commonly
used methods. In this paper, TLP and HBM on-wafer setups
are presented regarding their electrical schematics, the type of
data that is obtained, and the required calibration methodologies.
By using three case studies, both test methods are compared by
showing their advantages and disadvantages. It is demonstrated
that pulsed measurement methods like TLP testing are not always
a suitable tool to fully assess the ESD performance of devices or
ISSN: 0018-9456
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
* (joint) first author
× corresponding author
# (joint) last author

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