On the activation mechanisms of sub-melt laser anneals

Clarysse, T; Bogdanowicz, J; Goossens, J; Moussa, A; Rosseel, E; Vandervorst, Wilfried; Petersen, D; Lin, R; Nielsen, P; Hansen, O; Defranoux, C; Vertikov, A; Gostein, M; Bennett, N; Cowern, N; Faifer, V

E-MRS Sprng Meeting Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices, Date: 2008/05/26 - 2008/05/30, Location: Strasbourg, France

Publication date: 2008-01-01

On the activation mechanisms of sub-melt laser anneals

Author:

Clarysse, T

Bogdanowicz, J ; Goossens, J ; Moussa, A ; Rosseel, E ; Vandervorst, Wilfried ; Petersen, D ; Lin, R ; Nielsen, P ; Hansen, O ; Defranoux, C ; Vertikov, A ; Gostein, M ; Bennett, N ; Cowern, N ; Faifer, V