|ITEM METADATA RECORD
|Title: ||New SPM concept for accurate and repeatable tip positioning|
|Authors: ||Duriau, E.|
Vandervorst, Wilfried #
|Issue Date: ||2008 |
|Conference: ||34th International Conference on Micro- and Nano Engineering. location:Athens, Greece date:15-18 September 2008|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Nuclear and Radiation Physics Section|
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