Title: New SPM concept for accurate and repeatable tip positioning
Authors: Duriau, E.
Clarysse, T.
Hantschel, T.
Vandervorst, Wilfried #
Issue Date: 2008
Conference: 34th International Conference on Micro- and Nano Engineering. location:Athens, Greece date:15-18 September 2008
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Nuclear and Radiation Physics Section
# (joint) last author

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