|ITEM METADATA RECORD
|Title: ||Scanning spreading resistance microscopy for 3D-carrier Pprofiling in FinFET-based structures|
|Authors: ||Mody, J.|
Vandervorst, Wilfried #
|Issue Date: ||2008 |
|Host Document: ||MRS Symposium Proceedings - Doping Engineering for Front-End Processing. vol:1070 issue:E01-11|
|Conference: ||MRS Symposium location:San Francisco, CA, USA date:2008|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Nuclear and Radiation Physics Section|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.
© Web of science