Title: Scanning spreading resistance microscopy for 3D-carrier Pprofiling in FinFET-based structures
Authors: Mody, J.
Eyben, P.
Polspoel, W.
Jurczak, M.
Vandervorst, Wilfried #
Issue Date: 2008
Host Document: MRS Symposium Proceedings - Doping Engineering for Front-End Processing. vol:1070 issue:E01-11
Conference: MRS Symposium location:San Francisco, CA, USA date:2008
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section
# (joint) last author

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