Title: Basic aspects of the formation and activation of boron junctions using plasma immersion ion implantation
Authors: Zschaetzsch, G.
Vandervorst, Wilfried
Hoffmann, T.
Goossens, J.
Everaert, J.
del Agua Borniquel, J.
Poon, T. #
Issue Date: 2008
Host Document: AIP Conference Proceedings 2008 vol:1066 pages:464-464
Conference: 17th International Conference on Ion Implantation Technology location:Monterey, CA, USA date:8-13 June 2008
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section
# (joint) last author

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