Title: Effect of substrate charging on the reliability of capacitive RF-MEMS switches
Authors: Czarnecki, Piotr ×
Rottenberg, X.
Soussan, P.
Ekkels, Phillip
Muller, P.
De Raedt, Walter
Tilmans, H.
Puers, Robert
Marchand, L.
De Wolf, Ingrid #
Issue Date: 2009
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A, Physical vol:154 pages:261-268
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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