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Title: Energy band-alignment of a multimetal-layer gated metal-oxide-semiconductor structure
Authors: Li, Zilan ×
Houssa, Michel
Schram, Tom
De Gendt, Stefan
De Meyer, Christina #
Issue Date: Nov-2009
Publisher: American Institute of Physics
Series Title: Applied Physics Letters vol:95 issue:18
Article number: 183506
Abstract: The energy band-alignment of a multimetal-layer gated metal-oxide-semiconductor structure is investigated. An analytical expression for the Fermi level of the metal stack is derived. It is shown that the thin metal layer contacting the gate dielectric plays a critical role in determining the work function of the whole metal stack, in agreement with experimental results.
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
Molecular Design and Synthesis
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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