Title: Molecular beam epitaxy passivation studies of Ge and III-V semiconductors for advanced CMOS
Authors: Merckling, Clement
Penaud, Julien
Bellenger, Florence
Lin, Denis
Alian, Ali
Kohen, David
Brammertz, Guy
Houssa, Michel
Caymax, Matty
Meuris, Marc
Heyns, Marc #
Issue Date: 2009
Publisher: Materials Research Society
Conference: MRS Meeting edition:Spring 2009 location:San-Francisco, USA date:April 2009
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Semiconductor Physics Section
Associated Section of ESAT - INSYS, Integrated Systems
Department of Materials Engineering - miscellaneous
# (joint) last author

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