Title: Impact of nitridation on recoverable and permanent negative bias temperature instability degradation in high-k/metal gate p-MOSFETs
Authors: Aoulaiche, Marc ×
Kaczer, Ben
Roussel, Philippe
O'Connor, Rob
Houssa, Michel
De Gendt, Stefan
Maes, Herman
Groeseneken, Guido #
Issue Date: Jan-2009
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:27 issue:1 pages:463-467
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
ESAT - MICAS, Microelectronics and Sensors
Molecular Design and Synthesis
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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