Title: Optical and structural properties of Eu-implanted InxAl1-xN
Authors: Roqan, I. S ×
O'Donnell, K. P
Martin, R. W
Trager-Cowan, C
Matias, V
Vantomme, André
Lorenz, K
Alves, E
Watson, I. M #
Issue Date: Oct-2009
Publisher: American Institute of Physics
Series Title: Journal of Applied Physics vol:106 issue:8 pages:1-4
Article number: 083508
Abstract: Low-energy heavy-ion Elastic Recoil Detection Analysis (ERDA) is becoming a mature technique for high-resolution characterization of thin films, i.e. below 50 nm thickness. In combination with a small tandem accelerator (similar to 2 MV terminal voltage) and beam energies below 20 MeV, it is suitable for routine analysis of key materials in semiconductor technology.
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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