Optical and structural properties of Eu-implanted InxAl1-xN
Roqan, I. S × O'Donnell, K. P Martin, R. W Trager-Cowan, C Matias, V Vantomme, André Lorenz, K Alves, E Watson, I. M #
American Institute of Physics
Journal of Applied Physics vol:106 issue:8 pages:1-4
Low-energy heavy-ion Elastic Recoil Detection Analysis (ERDA) is becoming a mature technique for high-resolution characterization of thin films, i.e. below 50 nm thickness. In combination with a small tandem accelerator (similar to 2 MV terminal voltage) and beam energies below 20 MeV, it is suitable for routine analysis of key materials in semiconductor technology.