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Title: Film thickness determination by laser ultrasonics
Authors: Lemaire, M. ×
Jenot, F.
Ouaftouh, M.
Xu, W.J.
Duquennoy, M.
Ourak, M.
Cote, R.
Salenbien, R.
Sarens, B.
Lauriks, W.
Glorieux, Christ #
Issue Date: 2009
Publisher: Societe Francaise Acoustique (SFA)
Host Document: Proceedings of Acoustics '08 pages:2511-2516
Conference: Acoustics '08 location:Paris, France date:29 June - 4 July 2008
Abstract: The thickness of films deposited on substrates is crucial for their thermal, electrical, optical behaviour. These properties are essential in thin film applications, especially in the field of microelectronics. In this study, we are interested in thickness determination of silver and gold films deposited by evaporation on a silicon substrate by using an ultrasonic non-destructive technique. In particular, the well-known laser ultrasonic technique is used to generate and detect the surface acoustic waves. Results obtained by two complementary methods allowing a non-contact measurement in a large bandwidth (from 5 MHz to 200 MHz) are presented, and the dispersion of the Rayleigh wave propagation velocity is analyzed to determine the film thickness.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Soft Matter and Biophysics
× corresponding author
# (joint) last author

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