Title: Shrinking solid-state nanopores using electron-beam-induced deposition
Authors: Kox, Ronald ×
Chen, Chang
Maes, Guido
Lagae, Liesbet
Borghs, Gustaaf #
Issue Date: Mar-2009
Publisher: Iop publishing ltd
Series Title: Nanotechnology vol:20 issue:11
Article number: 115302
Abstract: Solid-state nanopores of only a few nanometres in size show a great potential for applications such as molecule detection and DNA sequencing. In most cases, the fabrication of such a nanopore requires the high energy beam of a transmission electron microscope (TEM) or focused ion beam (FIB) tool to drill or reshape a small hole in a freestanding membrane. Here, we present a novel method to reduce the size of existing nanopores using electron-beam-induced deposition (EBID) of carbon in a conventional scanning electron microscope (SEM). The existing nanopores are etched in a silicon membrane using anisotropic wet etching and can be shrunk down to a few nanometres using EBID. This paper discusses the parameters that influence the rate of shrinking and provides an insight into the underlying mechanism.
ISSN: 0957-4484
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Quantum Chemistry and Physical Chemistry Section
Associated Section of ESAT - INSYS, Integrated Systems
Semiconductor Physics Section
Solid State Physics and Magnetism Section
× corresponding author
# (joint) last author

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