Title: An oscillator circuit for electrostatically driven silicon-based one-port resonators
Authors: Bienstman, Jan
Tilmans, Harrie
Peeters, Erik
Steyaert, Michel
Puers, Robert # ×
Issue Date: 1996
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A, Physical vol:52 issue:1-3 pages:179-186
Abstract: This paper describes design considerations and characteristics of oscillator circuitry for electrostatically driven silicon-based one-pea resonators, used as resonant strain gauges. The oscillation conditions for a general, single transconductance oscillator are theoretically derived. In order to start oscillation, guidelines to select proper bias conditions for the resonator are presented, taking the non-linear effects into account. An oscillator circuit has been designed in CMOS technology in order to verify the theory experimentally. Experimental results of the oscillator in combination with a silicon beam resonator are given.
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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