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Title: Study and Characterization of Thin Indium-Nickel Membranes for MEMS Encapsulation at Temperatures Below 200ºC (De studie en karakterisatie van dunne nikkel membranen voor de inkapseling van MEMS bij temperaturen onder 200°C)
Other Titles: Study and Characterization of Thin Indium-Nickel Membranes for MEMS Encapsulation at Temperatures Below 200ºC
Authors: Hellin Rico, Raquel; M0331364
Issue Date: 26-Feb-2010
Publication status: published
KU Leuven publication type: TH
Appears in Collections:Chemical and Extractive Metallurgy Section (-)
Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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