Title: Thin film vacuum (RF-)MEMS packaging
Authors: Van Hoof, Christiaan
Puers, B.
Celis, Jean-Pierre
Tilmans, H. #
Issue Date: 2009
Conference: IMEC PhD days location:Leuven, Belgium date:November 2009
Description: Poster
Publication status: published
KU Leuven publication type: AMa
Appears in Collections:Department of Materials Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
Chemical and Extractive Metallurgy Section (-)
# (joint) last author

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