Title: Etch rate optimization in reactive ion etching of epoxy photoresists
Authors: Driesen, Maarten
Wouters, Kristof
Puers, Robert #
Issue Date: Sep-2009
Host Document: Proceedings of the Eurosensors XXIII Conference vol:1 issue:1 pages:796-799
Conference: Eurosensors edition:XXIII location:Lausanne date:6-9 september 2009
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
# (joint) last author

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