Title: Residual stress and resistivity of sputtered metal layers
Authors: Driesen, Maarten
Puers, Robert #
Issue Date: Sep-2009
Conference: Micro & nano engineering edition:35 location:Gent date:28 september - 1 october 2009
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
# (joint) last author

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