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Title: A new characterization method for electrostatically actuated resonant MEMS: Determination of the mechanical resonance frequency, quality factor and dielectric charging
Authors: Kalicinski, S ×
Tilmans, H.A.C.
Wevers, Martine
De Wolf, Ingrid #
Issue Date: Sep-2009
Publisher: Elsevier science sa
Series Title: Sensors and actuators a-physical vol:154 issue:2 pages:304-315
Abstract: In this paper, a novel technique to characterize MEMS is described. The technique is based on electric admittance measurements of electrostatically actuated MEMS. It is capable of determining a number of characteristic parameters such as the unbiased (or true mechanical) resonance frequency, the unbiased quality factor and the residual voltage associated with dielectric charging. These parameters are extracted from the admittance measurements in a two-step computation procedure. They may serve as monitors of both mechanical and electrical changes in tested devices, which makes this technique an excellent tool for reliability assessment of various types of electrostatically driven MEMS. (C) 2008 Elsevier B.V. All rights reserved.
URI: 
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Mechanical Metallurgy Section (-)
Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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