Title: Nitrogen implantation - an alternative technique to reduce traps at SiC/SiO2-interfaces
Authors: Ciobanu, F.
Frank, T.
Pensl, G.
Afanas'ev, Valeri
Shamuilia, Sheron
Schoner, A.
Kimoto, T. #
Issue Date: 2006
Host Document: vol:527-529 pages:991
Conference: Silicon Carbide and Related Materials date:2006
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Department of Materials Engineering - miscellaneous
Semiconductor Physics Section
# (joint) last author

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