ITEM METADATA RECORD
Title: A dedicated loading instrument for characterization and testing of MEMS
Authors: Kalicinski, S.
Tezcan, D.S.
De Moor, Pieter
De Vries, A-C.
Van Hoof, Christiaan
Wevers, Martine
De Wolf, Ingrid #
Issue Date: 2005
Host Document: Proc. Micro System Technologies 2005, International Conference & Exhibition on Micro-, Electro-Mechanical, Opto & Nano Systems
Conference: Micro System Technologies 2005, International Conference & Exhibition on Micro-, Electro-Mechanical, Opto & Nano Systems location:Munich, Germany date:5-6 October 2005
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Mechanical Metallurgy Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
Department of Materials Engineering - miscellaneous
# (joint) last author

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