|ITEM METADATA RECORD
|Title: ||A dedicated loading instrument for characterization and testing of MEMS|
|Authors: ||Kalicinski, S.|
De Moor, Pieter
De Vries, A-C.
Van Hoof, Christiaan
De Wolf, Ingrid #
|Issue Date: ||2005 |
|Host Document: ||Proc. Micro System Technologies 2005, International Conference & Exhibition on Micro-, Electro-Mechanical, Opto & Nano Systems|
|Conference: ||Micro System Technologies 2005, International Conference & Exhibition on Micro-, Electro-Mechanical, Opto & Nano Systems location:Munich, Germany date:5-6 October 2005|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Mechanical Metallurgy Section (-)|
Associated Section of ESAT - INSYS, Integrated Systems
Department of Materials Engineering - miscellaneous
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