|ITEM METADATA RECORD
|Title: ||A combined silicon fusion and glass/silicon anodic bonding process for a uniaxial capacitive accelerometer|
|Authors: ||Peeters, Erik|
Puers, Robert ×
Sansen, Willy #
|Issue Date: ||1992 |
|Series Title: ||Journal of Micromechanics and Microengineering: Structures, Devices and Systems vol:2 pages:167-169|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||ESAT - MICAS, Microelectronics and Sensors|
× corresponding author|
# (joint) last author|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.