Title: A combined silicon fusion and glass/silicon anodic bonding process for a uniaxial capacitive accelerometer
Authors: Peeters, Erik
Vergote, Stefan
Puers, Robert ×
Sansen, Willy #
Issue Date: 1992
Publisher: IOP
Series Title: Journal of Micromechanics and Microengineering: Structures, Devices and Systems vol:2 pages:167-169
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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