Title: Stress release structures for actuator beams with a stress gradient
Authors: klaase, Gerard
Puers, Robert ×
Tilmans, Harrie #
Issue Date: 2007
Publisher: IOP
Series Title: Journal of Micromechanics and Microengineering: Structures, Devices and Systems vol:17 pages:2093-2101
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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