|ITEM METADATA RECORD
|Title: ||Silicon micro-mechanical senosrs: current techniques and future opportunities|
|Authors: ||Puers, Robert # ×|
|Issue Date: ||1991 |
|Publisher: ||Publicarto N.V.|
|Series Title: ||Journal A vol:32 issue:3 pages:5-12|
|Publication status: ||published|
|KU Leuven publication type: ||AT|
|Appears in Collections:||ESAT - MICAS, Microelectronics and Sensors|
× corresponding author|
# (joint) last author|
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