Title: Silicon micro-mechanical senosrs: current techniques and future opportunities
Authors: Puers, Robert # ×
Issue Date: 1991
Publisher: Publicarto N.V.
Series Title: Journal A vol:32 issue:3 pages:5-12
ISSN: 0771-1107
Publication status: published
KU Leuven publication type: AT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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