Euspen International Conference edition:9 location:San Sebastian, Spain date:2-5 June 2009
This paper discusses the challenge of achieving sub-micrometer precision in all six degrees of freedom of a linear slide in the presence of dynamic disturbance forces.
Non-contacting guiding solutions reduce friction, and so allow the highest linear positioning resolution. However, the flexibility of the bearing film and the carriage
structure, on the one hand, and the straightness error of the guiding surface, on the other, introduce a relatively high positioning uncertainty in the bearing directions. A
linear slide equipped with active aerostatic bearings for compensation in all degrees of freedom is proposed here, and the main design challenges are discussed.