Title: Development of an active aerostatic slide with sub- micrometer precision in six degrees of freedom
Authors: Aguirre Rejado, Gorka
Al-Bender, Farid
Van Brussel, Hendrik #
Issue Date: 2-Jun-2009
Host Document: EUSPEN Conference Proceedings vol:1 pages:316-319
Conference: Euspen International Conference edition:9 location:San Sebastian, Spain date:2-5 June 2009
Abstract: This paper discusses the challenge of achieving sub-micrometer precision in all six degrees of freedom of a linear slide in the presence of dynamic disturbance forces.
Non-contacting guiding solutions reduce friction, and so allow the highest linear positioning resolution. However, the flexibility of the bearing film and the carriage
structure, on the one hand, and the straightness error of the guiding surface, on the other, introduce a relatively high positioning uncertainty in the bearing directions. A
linear slide equipped with active aerostatic bearings for compensation in all degrees of freedom is proposed here, and the main design challenges are discussed.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
# (joint) last author

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