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Title: Microsized Piston-Cylinder Pneumatic and Hydraulic Actuators Fabricated by Lithography
Authors: De Volder, MichaĆ«l ×
Ceyssens, Frederik
Reynaerts, Dominiek
Puers, Robert #
Issue Date: Oct-2009
Publisher: Institute of Electrical and Electronics Engineers
Series Title: Journal of Microelectromechanical Systems vol:18 issue:5 pages:1100-1104
Abstract: Future microrobotic applications require actuators that can generate a high actuation force in a limited volume. Up to now, little research has been performed on the development of pneumatic or hydraulic microactuators, although they offer great prospects in achieving high force densities. In addition, large actuation strokes and high actuation speeds can be achieved by these actuators. This paper describes a fabrication process for piston-cylinder pneumatic and hydraulic actuators based on etching techniques, UV-definable polymers, and low-temperature bonding. Prototype actuators with a piston area of 0.15 mm2 have been fabricated in order to validate the production process. These actuators achieve actuation forces of more than 0.1 N and strokes of 750 micron using pressurized air or water as driving fluid.
ISSN: 1057-7157
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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