Title: A CMOS-compatible self-aligning capacitive accelerometer with Epoclad polymer on silicon (POS) technology
Authors: Wen, Lianggong
Wouters, Kristof
Ceyssens, Frederik
Puers, Robert #
Issue Date: Sep-2009
Host Document: MME 2009, 20th MicroMechanics Europe Workshop
Conference: MicroMechanics Europe Workshop edition:20 location:Toulouse,France date:20-22 september 2009
Article number: D15
Abstract: This paper presents the design and fabrication
of a CMOS-compatible micro-machined Epoclad
polymer on silicon (EPOS) accelerometer. The
accelerometer is a grating polymer structure
with a 45 μm thick Epoclad polymer proof mass
and a 3 μm freestanding gap below, integrated
with a silicon substrate. It is fabricated using a
simple 3-mask, low thermal budget process and
features full CMOS compatibility. The device
features self-aligning for the metallization step of
the polymer seismic mass. It allows the accurate
alignment of the moving electrodes on the
seismic mass with the counter electrodes on the
substrate. A post-process shadow mask
metallization technique is used to define these
self-aligning electrodes and insulate the bond
pad connection lines. The probe station test
along with the SEM inspection shows that fully
free-standing devices are successfully achieved.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Electrical Engineering - miscellaneous
# (joint) last author

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