Title: Fabrication of robust carbon nanotube microstructures by elastocapillary densification
Authors: De Volder, MichaĆ«l
Vidaud, Daniel
Stawfick, Sam
Hart, A. John #
Issue Date: 28-Sep-2009
Host Document: 35th International Conference on Micro & Nano Engineering (MNE) 2009 vol:35
Conference: International Conference on Micro & Nano Engineering edition:35 location:Ghent date:28 Sept - 1 Oct 2009
Abstract: Carbon nanotubes (CNTs) have been studied extensively because of their outstanding electrical,
mechanical and thermal properties. A common way to integrate CNTs in microsystems is to “grow” them
from a catalyst layer using Chemical Vapour Deposition (CVD) [1]. The shape of the microstructures is
controlled by patterning the thin catalyst layer which agglomerates to form catalyst nanoparticles. This
method is particularly interesting for fabricating high aspect ratio microstructures, as the CNTs selforganize
into a vertically aligned forest. Although this process is well established, the resulting CNT
density per area is low, and as a result, the bulk properties of these structures are far below those of
individual CNTs. Therefore, methods have been developed to increase the CNT density after growth. This
research focuses on the characterisation of a densification based on capillary self-assembly.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
# (joint) last author

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