Author:

Abstract:

The potential use of carbon nanotubes (CNT) as interconnects requires also new characterization approaches as the existing ones are optimized for three-dimensional materials and do not work for inherently one-dimensional structures like CNTs. Therefore, we have developed a so-called pick-and-place process which allows to remove an individual CNT from a specific site and to place it at another location for further analysis. The approach is based on nanomanipulation combined with scanning electron microscopy (SEM). This paper presents the pick-and-place concept and explains the different steps. We further demonstrate its power by characterizing individual CNTs using transmission electron microscopy (TEM) and atomic force microscopy (AFM). The developed pick-and-place approach overcomes the challenge of sitespecific analysis of CNT interconnects and strongly facilitates the routine analysis of CNTs. © 2008 Materials Research Society.