Title: Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
Authors: Bogdanowics, J.
Dortu, F.
Clarysse, T.
Vandervorst, Wilfried
Shaughnessy, D.
Salnick, A.
Nicolaides, L #
Issue Date: 2008
Host Document: E-MRS Spring Meeting Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices.
Conference: E-MRS Spring Meeting location:Strasbourg, France date:26-30 July 2008
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section
# (joint) last author

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