|ITEM METADATA RECORD
|Title: ||Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance|
|Authors: ||Bogdanowics, J.|
Nicolaides, L #
|Issue Date: ||2008 |
|Host Document: ||E-MRS Spring Meeting Symposium I: Front-End Junction and Contact Formation in Future Silicon/Germanium Based Devices.|
|Conference: ||E-MRS Spring Meeting location:Strasbourg, France date:26-30 July 2008|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Nuclear and Radiation Physics Section|
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