Title: Simultaneous real-time x-ray diffraction spectroscopy, Rutherford backscattering spectrometry, and sheet resistance measurements to study thin film growth kinetics by Kissinger plots
Authors: Smeets, Dries ×
Demeulemeester, Jelle
Deduytsche, D
Detavernier, C
Comrie, C. M
Theron, C. C
Lavoie, C
Vantomme, André #
Issue Date: Nov-2008
Publisher: Amer inst physics
Series Title: Journal of Applied Physics vol:104 issue:10 pages:1-5
Article number: 103538
Abstract: When the Kissinger method is used to investigate thin film growth kinetics, activation energies obtained are often significantly higher than those of Arrhenius plots based on isothermal studies. The reason for the higher activation energies is related to the sensitivity of the Kissinger analysis to nucleation effects. In fact, this often undesirable effect opens the possibility of studying nucleation barriers in a semiquantitative way. Furthermore, we show that these nucleation effects can be filtered out by a more careful application of the Kissinger method, and activation energies that are consistent with Arrhenius plots are then obtained.
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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