Title: Ultra-shallow junctions formed by C co-implantation with spike plus sub-melt laser annealing
Authors: Felch, S. ×
Collart, E.
Parihar, V.
Thirupapulyur, S.
Schreutelkamp, R.
Pawlak, B.
Hoffmann, T.
Severi, S.
Eyben, P.
Vandervorst, Wilfried
Noda, T. #
Issue Date: 2008
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:26 issue:1 pages:281-285
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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