Title: Ni-silicides as gate electrode materials for scaled CMOS technologies
Other Titles: Ni-silicides als poortelectrodemateriaal voor CMOS-technologieën met gereduceerde transistorafmetingen.
Authors: Pawlak, Malgorzata; M0231676
Issue Date: 20-May-2008
Publication status: published
KU Leuven publication type: TH
Appears in Collections:Nuclear and Radiation Physics Section

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