ITEM METADATA RECORD
Title: Growth and Characterisation of Atomic Layer Deposited Ultra-Thin WNxCy Films (Groei en karakterisering van ultra dunne atomic layer deposited WNxCy lagen)
Other Titles: Growth and Characterisation of Atomic Layer Deposited Ultra-Thin WNxCy Films
Authors: Martin, Ana Isabel; M0231654
Issue Date: 1-Jun-2006
Publication status: published
KU Leuven publication type: TH
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Chemical and Extractive Metallurgy Section (-)

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