Title: Evaluation of barrier and seed layers in 3D structures etched in silicon for interconnect technology
Authors: Lühn, Ole
Van Hoof, Christiaan
Ruythooren, W.
Celis, Jean-Pierre #
Issue Date: 2008
Host Document: oral presentation
Conference: Materials for Advanced Metallization Conference (MAM) 2008 location:Dresden, Germany date:2-5 March 2008
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Department of Materials Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
Chemical and Extractive Metallurgy Section (-)
# (joint) last author

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