Title: Evaluation of platinum as a structural thin film material for rf-mems devices
Authors: ekkels, phillip ×
Rottenberg, Xavier
Puers, Robert
Tilmans, Harrie #
Issue Date: 20-May-2009
Publisher: IOP
Series Title: Journal of Micromechanics and Microengineering: Structures, Devices and Systems vol:19 issue:6
Article number: 065010
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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