ITEM METADATA RECORD
Title: Simple and robust air gap-based MEMS switch technology for RF-applications
Authors: ekkels, phillip
Rottenberg, Xavier
Czarnecki, Piotr
Puers, Robert
Tilmans, Harrie #
Issue Date: Jan-2009
Host Document: Proc. of the 22th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) pages:856-859
Conference: IEEE International Conference on Micro Electro Mechanical Systems (MEMS) edition:22 location:Sorrento, Italy date:25-29 januari
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
# (joint) last author

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