Journal of Micro-Nano Mechatronics vol:4 issue:3 pages:131-143
This paper presents the design, the realization and the modelling of an ortho-planar one-way microvalve that can be used in a micropump. The main advantages of such valves are that they are very compact and can be made from a single flat piece of material. An analytical model of the spring deflection has been developed and tested, and results are compared to Finite Elements Modelling. Several prototypes with a bore of 0.2 mm have been built using two manufacturing techniques, micro Electro Discharge Machining and stereo-lithography, and tested for a pressure up to 7 bars.