Title: Modelling, characterization and testing of an ortho-planar micro-valve
Authors: Smal, Olivier ×
Dehez, Bruno
Benoît, Raucent
De Volder, Michaƫl
Peirs, Jan
Reynaerts, Dominiek
Ceyssens, Frederik
Puers, Robert #
Issue Date: Dec-2008
Publisher: Springer
Series Title: Journal of Micro-Nano Mechatronics vol:4 issue:3 pages:131-143
Abstract: This paper presents the design, the realization and the modelling of an ortho-planar one-way microvalve that can be used in a micropump. The main advantages of such valves are that they are very compact and can be made from a single flat piece of material. An analytical model of the spring deflection has been developed and tested, and results are compared to Finite Elements Modelling. Several prototypes with a bore of 0.2 mm have been built using two manufacturing techniques, micro Electro Discharge Machining and stereo-lithography, and tested for a pressure up to 7 bars.
ISSN: 1865-3928
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Production Engineering, Machine Design and Automation (PMA) Section
× corresponding author
# (joint) last author

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