The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2009. Digest of Technical Papers. (TRANSDUCERS '09. )
Transducers edition:15 location:Denver, USA date:21-25 June 2009
Applications where a microsystem has to interface with the outside world are often face the rather small force output or stroke that a typical microfabricated actuator can generate.
However, microscale piston-cylinder pneumatic or hydraulic actuators offer a significant improvement of the stroke and force output of microactuators. For the first time, a process is presented that enables batch fabrication of such actuators by a lithographic process based on SU-8 photoepoxy. The total volume of the smallest of these actuators is a mere ~1 mm³. The maximum force obtained is 37 mN for an applied pressure of 10 bars. The actuator stroke is 1.1 mm.