Title: Large stroke high force pneumatic actuators fabricated by SU-8 micromachining
Authors: Ceyssens, Frederik
De Volder, Michaƫl
Reynaerts, Dominiek
Puers, Robert #
Issue Date: Jun-2009
Publisher: IEEE
Host Document: The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2009. Digest of Technical Papers. (TRANSDUCERS '09. )
Conference: Transducers edition:15 location:Denver, USA date:21-25 June 2009
Abstract: ABSTRACT
Applications where a microsystem has to interface with the outside world are often face the rather small force output or stroke that a typical microfabricated actuator can generate.
However, microscale piston-cylinder pneumatic or hydraulic actuators offer a significant improvement of the stroke and force output of microactuators. For the first time, a process is presented that enables batch fabrication of such actuators by a lithographic process based on SU-8 photoepoxy. The total volume of the smallest of these actuators is a mere ~1 mm³. The maximum force obtained is 37 mN for an applied pressure of 10 bars. The actuator stroke is 1.1 mm.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Production Engineering, Machine Design and Automation (PMA) Section
# (joint) last author

Files in This Item:
File Description Status SizeFormat
abstract_4pages_FC_MDV_BP.pdf Published 833KbAdobe PDFView/Open Request a copy

These files are only available to some KU Leuven Association staff members


All items in Lirias are protected by copyright, with all rights reserved.