Title: Analytical model of the DC-actuation of electrostatic MEMS devices with distributed dielectric charging and non-planar electrodes
Authors: Rottenberg, Xavier ×
De Wolf, Ingrid
Nauwelaers, Bart
De Raedt, Walter
Tilmans, Harrie #
Issue Date: Oct-2007
Publisher: Institute of Electrical and Electronics Engineers
Series Title: Journal of microelectromechanical systems vol:16 issue:5 pages:1243-1253
ISSN: 1057-7157
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT- TELEMIC, Telecommunications and Microwaves
× corresponding author
# (joint) last author

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