Sensors and Actuators A, Physical vol:156 issue:1 pages:196-200
In this study, a fundamental measurement of the Young’s modulus of Epoclad and Epocore negative photo
resist is performed, using a miniature tensile test setup. The experiments were done on miniature dog
bone tensile test structures which are fabricated using normal micro machining methods. In addition, the
creep behavior and the maximum stress and strain at the point of fracture of the resists is recorded. The
two resists reveal a mechanical behavior very similar to the well-reported resist SU-8. SU-8 is also tested
using the same tools for comparison.