Title: Determining the Young’s modulus and creep effects in three different photo definable epoxies for MEMS applications
Authors: Wouters, Kristof ×
Puers, Robert #
Issue Date: Nov-2009
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A, Physical vol:156 issue:1 pages:196-200
Abstract: In this study, a fundamental measurement of the Young’s modulus of Epoclad and Epocore negative photo
resist is performed, using a miniature tensile test setup. The experiments were done on miniature dog
bone tensile test structures which are fabricated using normal micro machining methods. In addition, the
creep behavior and the maximum stress and strain at the point of fracture of the resists is recorded. The
two resists reveal a mechanical behavior very similar to the well-reported resist SU-8. SU-8 is also tested
using the same tools for comparison.
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

Files in This Item:
File Description Status SizeFormat
finalPublication.pdfMain article Published 909KbAdobe PDFView/Open


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science