Title: CD control for two-dimensional features in future technology nodes
Authors: Verhaegen, S
Jonckheere, Renaat
Ronse, K
Gordon, R. L
McCallum, M #
Issue Date: 2001
Host Document: Optical microlithography XIV. - Santa Clara, USA: SPIE
Conference: SPIE Optical microlithography edition:14th location:Santa Clara, USA date:27 February-2 March, 2001
Description: Archeologie (OE)
ISBN: 9780819440327
Publication status: submitted
KU Leuven publication type: IC
Appears in Collections:Archaeology, Leuven
# (joint) last author

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