Title: Static and Dynamic MEMS device characterisation
Authors: Ferraris, Eleonora ×
Fassi, Irene
De Masi, Biagio
Rosing, Richard
Richardson, Andrew #
Issue Date: Feb-2007
Publisher: Angel Business Communications Ltd.
Series Title: Euroasia Semiconductor
Abstract: MEMS are quickly pervading every aspect of the technical world but only a handful are making the grade as commercially viable products. The very diversity creates manufacturing differences that makes it difficult to create a wide variety of devices. In this article, Eleonora Ferraris and Irene Fassi from Institute of Industrial Technology and Automation, Biagio De Masi from MEMS Business Unit, STMicroelectronics, Richard Rosing and Andrew Richardson from Centre for Microsystems Engineering, Lancaster University discuss two empirical methods suitable for the static and the dynamic characterisation of micrometersized structures.
ISSN: 1751-1135
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
Mechanical Engineering Technology TC, Technology Campus De Nayer Sint-Katelijne-Waver
Technologiecluster Werktuigkundige Industriƫle Ingenieurstechnieken
× corresponding author
# (joint) last author

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