Title: Application of an innovative method for the fatigue characterisation of the 15 um thick epitaxial polysilicon
Authors: Ferraris, Eleonora
Fassi, Irene
Del Sarto, Marco #
Issue Date: Apr-2006
Publisher: IEEE
Host Document: Proceedings of EUROSIME 2006 pages:729-735
Conference: EUROSIME edition:2006 location:Como, Italia date:24-26 April 2006
Article number: 06
Abstract: The present work deals with the application of a new
method for the on-chip fatigue characterization of micro
electromechanical systems. The method is based on the
fact that the 2nd harmonic of comb actuated system is
proportional to the driving velocity; thus an indirect
monitoring of the system displacement is possible and the
sample breaking can be registered by electrical
measurements. The method has been applied for
characterising the industrial material used by
STMicroelectronics: a 15 μm thick epitaxial polysilicon
and the experimental results have been compared to the
literature data. In particular, the computed relative
strength reduction to the cycles to failure follow the same
trend derived in different loading conditions of frequency,
thus confirming a not time depending failure mechanism.
ISBN: 1-4244-0275-1
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
Mechanical Engineering Technology TC, Technology Campus De Nayer Sint-Katelijne-Waver
Technologiecluster Werktuigkundige Industriƫle Ingenieurstechnieken
# (joint) last author

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