Title: 0.5 nm EOT low leakage ALD SrTiO3 on TiN MIM capacitors for DRAM applications
Authors: Menou, N.
Wang, X.
Kaczer, B.
Polspoel, W.
Popovici, M.
Opsomer, K.
Pawlak, M.
Knaepen, W.
Detavernier, C.
Blomberg, T.
Pierreux, D.
Swerts, J.
Maes, J.
Favia, P.
Bender, H.
Brijs, B.
Vandervorst, Wilfried
Van Elshocht, S.
Wouters, D.
Biesemans, S.
Kittl, Jorge #
Issue Date: 2008
Host Document: Technical Digest International Electron Devices Meeting - IEDM 2008 pages:929-632
Conference: International Electron Devices Meeting - IEDM 2008 location:San Francisco, CA, USA date:15-17 December 2008
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section
# (joint) last author

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