Title: Advanced 2D/3D simulations for laser annealed device using an atomic kinetic monte carlo approach and scanning spreading resistance microscopy (SRRM)
Authors: Noda, T.
Eyben, P.
Vandervorst, Wilfried
Vrancken, C.
Rosseel, E.
Ortolland, C.
Clarysse, T.
Goossens, J.
De Keersgieter, A.
Felch, S.
Schreutelkamp, R.
Absil, P.
Jurczak, M.
De Meyer, K.
Biesemans, S.
Hoffmann, T. #
Issue Date: 2008
Host Document: Technical Digest International Electron Devices Meeting - IEDM 2008 pages:539-542
Conference: International Electron Devices Meeting - IEDM 2008 location:San Francisco, CA, U.S.A. date:15-17 December 2008
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section
# (joint) last author

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