Title: Insights in junction photovoltage based sheet resistance measurements for advanced complementary metal-oxide semiconductor
Authors: Clarysse, T. ×
Moussa, A.
Zangerle, T.
Schaus, F.
Vandervorst, Wilfried
Faifer, V.
Current, M. #
Issue Date: Jan-2008
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:26 issue:1 pages:420-424
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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