Title: Semiconductor profiling with sub-nm resolution: Challenges and solutions
Authors: Vandervorst, Wilfried # ×
Issue Date: Dec-2008
Publisher: New York
Series Title: Applied Surface Science vol:255 issue:4 pages:805-812
ISSN: 0169-4332
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science