ITEM METADATA RECORD
Title: Semiconductor profiling with sub-nm resolution: Challenges and solutions
Authors: Vandervorst, Wilfried # ×
Issue Date: Dec-2008
Publisher: New York
Series Title: Applied Surface Science vol:255 issue:4 pages:805-812
ISSN: 0169-4332
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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