Title: On the analysis of the activation mechanisms of sub-melt laser anneals
Authors: Clarysse, T. ×
Bogdanowicz, Janusz
Goossens, J.
Moussa, A.
Rosseel, E.
Vandervorst, Wilfried
Petersen, D.
Lin, R.
Nielsen, P.
Hansen, O.
Merklin, G.
Bennett, N.
Cowern, N. #
Issue Date: Dec-2008
Publisher: Elsevier Sequoia
Series Title: Materials Science and Engineering B, Solid-State Materials for Advanced Technology vol:154-155 pages:24-30
ISSN: 0921-5107
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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